Dr. Mathias Bach and Stefan Vorndran
Dr. Mathias Bach is Head of Piezo Systems at PI (Physik Instrumente) L.P. Stefan Vorndran is vice president of marketing at PI (Physik Instrumente) L.P.
Articles
Active piezoelectric shims improve machine precision
Due to the piezo element’s high resolution down to the nanometer range, active shims cover applications in classical mechanical precision engineering as well as the alignment of optical components in astronomy, semiconductor manufacturing, and in materials research employing beamline instrumentation.