Brooks acquires part of Celerity

Brooks Instrument has acquired certain assets of Celerity’s

Instrumentation division. Acquired assets include Celerity’s Allen,

TX operations; its Irvine, CA

technology center; and other sales and service locations throughout the world.

The acquisition includes Celerity’s next generation GF

series thermal mass flow controller, which is designed to precisely measure,

monitor and control ultra high purity process gas chemistry in semiconductor

device and solar cell manufacturing processes. Brooks also acquired other

specialty product lines that serve vacuum and pressure measurement markets.

Brooks Instrument provides level gauges, flow measurement

and control devices. Celerity designs and manufactures precision instruments

and advanced gas and liquid delivery solutions, which includes thermal mass

flow devices for the semiconductor industry.

Financial terms of the transaction were not disclosed.

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