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Greg Helgeson, Manufacturing Plant 4, Entegris, Inc., Chaska, MN

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Mobility June 1, 2000

Maintaining cleanrooms and clean manufacturing areas

Key concepts Cleanrooms and clean manufacturing areas require special maintenance considerations. Sources of contamination are environment, process, tools, and people.

By Greg Helgeson, Manufacturing Plant 4, Entegris, Inc., Chaska, MN

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