Semiconductor machine productivity compounded with XY positioning

Airglide LED Wafer System from Dover Motion is a maintenance-free positioning platform available with wider base for increased stiffness over travels up to 1 meter.


The Airglide LED Wafer System from Dover is available in a wide base version for additional stiffness and support for larger payloads up to 110 lb, over travels up to 3 ft. Combined with, high accuracy and velocity stability while scanning, the Airglide system is a maintenance-free positioning solution for stepping or scanning applications, and is suited for laser processing of LED or semiconductor wafers. Other applications include metrology or precision imaging systems which require high accuracy step positioning moves.

“The Airglide platform is flexible in its ability to be setup as an individual precision axis, or stacked as an XY assembly. Further, it uses ultra-precision air bearing ways to deliver clean and accurate positioning that, combined with zero-maintenance operation, maximizes system reliability which is vital for high throughput applications,” says John Garrity, Business Development Manager, Dover. “Users will find that the Airglide XY configuration is ideally suited to applications that require precise steps combined with velocity stability while scanning. Its straightness of motion makes it a perfect platform to be integrated into tools for LED and semiconductor laser processing and inspection.”

The Airglide system deliver straightness to ±0.5 µm, compensated accuracy to <1 µm, and bi-directional repeatability to ±0.4 µm. Depending upon the payload, it can accelerate at 16 ft/s2, provide maximum velocity of 40 in/s, and deliver continuous force of 76 N and peak force of 240 N over available travel ranges from 4 to 40 in. The system can be operated with industry-standard servo drive control hardware, or packaged with a Dover control solution to deliver custom positioning performance.

Available options include complete motion rotary and z-theta products, granite base, and granite bridge, which can be integrated with the Airglide XY. When configured in a vertical orientation for use as a Z axis, a pneumatic counterbalance system can be provided. Customized pneumatic tubing and signal cabling is also available for customer-enabling technology or additional axes.


- Edited by Gust Gianos, Control Engineering,

No comments
The Top Plant program honors outstanding manufacturing facilities in North America. View the 2013 Top Plant.
The Product of the Year program recognizes products newly released in the manufacturing industries.
The Engineering Leaders Under 40 program identifies and gives recognition to young engineers who...
Sister act: Building on their father's legacy, a new generation moves Bales Metal Surface Solutions forward; Meet the 2015 Engineering Leaders Under 40
2015 Mid-Year Report: Manufacturing's newest tool: In a digital age, digits will play a key role in the plant of the future; Ethernet certification; Mitigate harmonics; World class maintenance
2015 Lubrication Guide: Green and gold in lubrication: Environmentally friendly fluids and sealing systems offer a new perspective
Drilling for Big Data: Managing the flow of information; Big data drilldown series: Challenge and opportunity; OT to IT: Creating a circle of improvement; Industry loses best workers, again
Pipeline vulnerabilities? Securing hydrocarbon transit; Predictive analytics hit the mainstream; Dirty pipelines decrease flow, production—pig your line; Ensuring pipeline physical and cyber security
Cyber security attack: The threat is real; Hacking O&G control systems: Understanding the cyber risk; The active cyber defense cycle
Designing positive-energy buildings; Ensuring power quality; Complying with NFPA 110; Minimizing arc flash hazards
Building high availability into industrial computers; Of key metrics and myth busting; The truth about five common VFD myths
New industrial buildings: Greener, cleaner, leaner; New building designs for industry; Take a new look at absorption cooling; Offshored jobs start to come back

Annual Salary Survey

After almost a decade of uncertainty, the confidence of plant floor managers is soaring. Even with a number of challenges and while implementing new technologies, there is a renewed sense of optimism among plant managers about their business and their future.

The respondents to the 2014 Plant Engineering Salary Survey come from throughout the U.S. and serve a variety of industries, but they are uniform in their optimism about manufacturing. This year’s survey found 79% consider manufacturing a secure career. That’s up from 75% in 2013 and significantly higher than the 63% figure when Plant Engineering first started asking that question a decade ago.

Read more: 2014 Salary Survey: Confidence rises amid the challenges

Maintenance and reliability tips and best practices from the maintenance and reliability coaches at Allied Reliability Group.
The One Voice for Manufacturing blog reports on federal public policy issues impacting the manufacturing sector. One Voice is a joint effort by the National Tooling and Machining...
The Society for Maintenance and Reliability Professionals an organization devoted...
Join this ongoing discussion of machine guarding topics, including solutions assessments, regulatory compliance, gap analysis...
IMS Research, recently acquired by IHS Inc., is a leading independent supplier of market research and consultancy to the global electronics industry.
Maintenance is not optional in manufacturing. It’s a profit center, driving productivity and uptime while reducing overall repair costs.
The Lachance on CMMS blog is about current maintenance topics. Blogger Paul Lachance is president and chief technology officer for Smartware Group.