Integrated linear motor stage

Aerotech’s PlanarDL-series delivers geometric performance for applications where precision is critical and it has three positioning performance options as well as anti-creep crossed-roller bearings.


Aerotech’s PlanarDL-series delivers geometric performance for applications where precision is critical and it has three positioning performance options as well as anti-creep crossed-roller bearings. Courtesy: AerotechAerotech’s PlanarDL-series offer geometric and dynamic performance for applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing. 

The PlanarDL XY design allows for planar geometric performance in applications where straightness and flatness of motion are critical. PlanarDL structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design provide the smooth motion ideal for the most challenging scanning applications. 

At the heart of the PlanarDL is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear-motor designs. 

The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process parameters. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy. 

The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics. 

The PlanarDL is available in three positioning performance options: -BASE, -PLUS and -ULTRA. The -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.


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