Medium flow controller

Sierra Instruments expands the Smart-Trak 50 Series with its Medium Flow Controller. The controller is designed for OEMs that require higher mass flow control capability.


Sierra Instruments announced the global introduction of its Smart-Trak 50 Series Medium Flow Controller. The new mass flow controller increases the maximum flow range of the award-winning Smart-Trak 50 Series from 50 slpm to 200 slpm. Sierra’s new 200 slpm controller is designed for OEMs who require higher mass flow control capability.

The 50 Series Medium Flow Controller, said Matthew J. Olin, president of Sierra Instruments, was developed early last year for a "high volume OEM customer who has a furnace purge application that requires accurate Argon flow control. They’ve been using the 50 Series in their furnaces to stabilize gas mass flow and temperature." Measurement repeatability has improved yields.

The 50 Series builds on the same core sensor, LFE and valve technology found in Sierra’s flagship Smart-Trak 100 Series. The 50 Series has a standard accuracy of +/- 1.5% of full scale that works for nearly all common semiconductor purge and carrier gases. A flexible and powerful direct-acting frictionless-hovering control valve sets it apart from the competition by minimizing leak-by, while offering +/- 0.25% repeatability.

In contrast to the many wetted parts of CMOS and MEMS flow sensors, Sierra uses its advanced 316L stainless steel platinum-wound capillary sensor technology to deliver the highest reliability, repeatability and stable accuracy.

The Smart-Trak 50 Series offers flexibility and simplicity of operation. Both analog and digital inputs and outputs are available, enabling the 50 Series to work with older analog systems or the newest multi-drop digital tools. Field adjustment of zero and span enable the small adjustments in calibration necessary to align with on-site process conditions. 

Sierra Instruments

- Edited by Chris Vavra, Control Engineering, 

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