Vacuum inlet trap
-- Plant Engineering, 3/15/2008
The MV Multi-Trap 16-inch vacuum inlet trap features a knock-down stage, two stages of user-selectable filter elements and cooling coils that remove condensable byproducts and corrosives from deposition process lines. Constructed of 304 stainless steel with ISO-160 flanges, the trap protects vacuum pumps used in ALD, HCD, Nitride, TEOS and TiN processes. The trap is capable of accumulating 2,500-cubic inches of solids and is customizable, with several filter options including stainless steel gauze, micro-rated polypropylene, activated alumina or charcoal and residual solvent vapor acids and particulates.
MV Products, div. of Mass-Vac Inc.
