Vacuum pump
By Staff -- Plant Engineering, 8/1/2006
A modular, high-capacity vacuum pump inlet trap for new or retrofit installation with 300-mm wafer fabricators and processes such as nitride, TEOS, TiN, AlO3, and BPSG. The MV multi-trap, 16-inch vacuum inlet trap features a first stage knock-down baffle, multiple stages of user-selectable filtration, and can be equipped with a cooling option for condensables. The vacuum inlet trap is available with stainless steel gauze, micro-rated polypropylene, activated alumina or charcoal, Sodasorb and other media to remove residual solvent vapor acids and particulates. Filter elements are offered in 4.5-inch and 9-inch tall versions, and the traps are made of 304 stainless steel.
MV Products, Division of Mass-Vac, Inc.
